HSC-S3810 is a brush clean system developed according to the industry's cutting-edge technology, it’s based on the innovative technology of Hwatsing's independent intellectual property rights, equipped with superior parameter closed-loop control system, it also has front, back and edge cleaning functions, and can achieve damage free cleaning. HSC-S3810 covers an area of small, high output.
Integrated design,smaller footprint, high throughput
Pull-out chamber design,convenient operation and maintenance
Real-time, high precision parameters closed-loop control technolgy
Capable of wafer frontside,backside and bevel cleaning function
Non-Pattern damage by advanced atomization clean technology